Precision Manufacturing

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Customized equipment - PECVD equipment special gas ratio module

PECVD equipment special gas ratio module

Functional Description:

Application industry: solar cell manufacturing;

Purpose: Gas distribution module for plate PECVD equipment, providing mixed special gases required for silicon nitride thin film process;

Product Description: Based on the customer's specific gas ratio requirements, we provide customized services such as process design, material selection, control algorithm optimization, equipment manufacturing, etc.

 

 

Confidentiality NoticeThis case involves the client's trade secrets, and it is strictly prohibited to reprint or quote them in any form to the outside world. Violators will be held accountable in accordance with the law.