Project: Zhejiang University Hangzhou International Science and Technology Innovation Center Project Phase I EPC Engineering General Contracting Micro Nano Ultra Clean Laboratory Platform Phase I Project

Location:Hangzhou, Zhejiang

Time:2021

Service scope:Gas system, chemical system, FMCS weak current system

Main features:Main products: 12 inch CMOS integrated circuit chips

This project involves the construction of the newly built LAB1 and CUB, creating a space for the smooth operation of the micro nano ultra clean laboratory platform; In addition, new outdoor pipe galleries, connecting corridors, material warehouses, Class A chemical warehouses, gas rooms, and ancillary buildings will be built, including clean room related mechanical and electrical installations, general mechanical and electrical installation engineering, pure wastewater, exhaust gas, gas chemicals, and other factory system engineering. The main clean research area and power area have a building area of approximately 30000 square meters; The system design and main system capabilities meet the process requirements of the scientific research platform.

Confidentiality NoticeThis case involves the client's trade secrets, and it is strictly prohibited to reprint or quote them in any form to the outside world. Violators will be held accountable in accordance with the law.